無塵室分級｜各國無塵室規範
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無塵室起源於1960年代美國聯邦標準Fed-Std-209E，之後日漸普及並廣為半導體業與製藥業所接受。90年代後期因應全球化趨勢，ISO-14644應運而生。隨著工業的日益發展，在歐洲與日本也有各自規範，但目前國際仍以「ISO-14644-1 」及美國「Fed-Std-209E」為主流，茲列舉如下：
ISO-14644-1 無塵室分級
| 每立方公尺等於或大於下述粒徑之微粒的最大容許量 | ||||||
| 等級 | 0.1μm | 0.2μm | 0.3μm | 0.5μm | 1.0μm | 5.0μm |
| ISO Class 1 | 10 | 2 | — | — | — | — |
| ISO Class 2 | 100 | 24 | 10 | 4 | — | — |
| ISO Class 3 | 1,000 | 237 | 102 | 35 | 8 | — |
| ISO Class 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | — |
| ISO Class 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| ISO Class 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO Class 7 | — | — | — | 352,000 | 83,200 | 2,930 |
| ISO Class 8 | — | — | — | 3,520,000 | 832,000 | 29,300 |
| ISO Class 9 | — | — | — | 35,200,000 | 8,320,000 | 293,000 |
| NOTE Uncertainties related to the measurement process requires that concentration data with no more then three significant figures be used in determining the classification level. Equation (1): Cn = 10N X (0.1/D)2.08 其中Cn是微粒濃度，N 是潔淨度，D 是粒徑 |
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美國聯邦標準209E 無塵室等級
| 工業用潔淨室 潔淨度 |
微塵粒子粒徑 | ||||||||||
| 0.1μm | 0.2μm | 0.3μm | 0.5μm | 5.0μm | |||||||
| 累積粒子數 | 累積粒子數 | 累積粒子數 | 累積粒子數 | 累積粒子數 | |||||||
| SI | Class | (m3) | (ft3) | (m3) | (ft3) | (m3) | (ft3) | (m3) | (ft3) | (m3) | (ft3) |
| M1 | 350 | 9.91 | 75.7 | 2.14 | 30.9 | 0.875 | 10.0 | 0.283 | – | – | |
| M1.5 | 1 | 1240 | 35.0 | 265 | 7.50 | 106 | 3.00 | 35.3 | 1.00 | – | – |
| M2 | 3,500 | 99.1 | 757 | 21.4 | 309 | 8.75 | 100 | 2.83 | – | – | |
| M2.5 | 10 | 12,400 | 350 | 2,650 | 75.0 | 1,060 | 30.0 | 353 | 10.0 | – | – |
| M3 | 35,000 | 991 | 7,570 | 214 | 3,090 | 87.5 | 1,000 | 28.3 | – | – | |
| M3.5 | 100 | – | – | 26,500 | 750 | 10.600 | 300 | 3,530 | 100 | – | – |
| M4 | – | – | 75,700 | 2,140 | 30,900 | 875 | 10,000 | 283 | – | – | |
| M4.5 | 1000 | – | – | – | – | – | – | 35,300 | 1,000 | 247 | 7.00 |
| M5 | – | – | – | – | – | – | 100,000 | 2,830 | 618 | 17.5 | |
| M5.5 | 10,000 | – | – | – | – | – | – | 353,000 | 10,000 | 2,470 | 70.0 |
| M6 | – | – | – | – | – | – | 1,000,000 | 28,300 | 6,180 | 175 | |
| M6.5 | 100,000 | – | – | – | – | – | – | 3,530,000 | 100,00 | 24,700 | 700 |
| M7 | – | – | – | – | – | – | 10,000,000 | 283,000 | 61,800 | 1,750 | |
日本標準 JIS B 9920 無塵室廠房等級區分
| 每立方公尺等於或大於下述粒徑之微粒的最大容許量 | ||||||
| 等級 | 0.1μm | 0.2μm | 0.3μm | 0.5μm | 1μm | 5μm |
| Class1 | 10 | 2 | — | — | — | — |
| Class2 | 100 | 24 | 10 | 4 | — | — |
| Class3 | 1,000 | 237 | 102 | 35 | 8 | — |
| Class4 | 10,000 | 2,370 | 1,020 | 352 | 83 | — |
| Class5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| Class6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| Class7 | — | — | — | 352,000 | 83,200 | 2,930 |
| Class8 | — | — | — | 3,520,000 | 832,000 | 29,300 |
| Class9 | — | — | — | 35,200,000 | 8,320,000 | 293,000 |
英國標準 BS 5295 無塵室的等級規範
| 等級 | 每立方公尺等於或大於下述粒徑之微粒的最大容許量 | ||||
| 0.5μm | 1μm | 5μm | 10μm | 25μm | |
| Class 1 | 3,000 | — | 0 | 0 | 0 |
| Class 2 | 300,000 | — | 2,000 | 30 | — |
| Class 3 | — | 1,000,000 | 20,000 | 4,000 | 300 |
| Class 4 | — | — | 200,000 | 40,000 | 4,000 |
世界主要無塵室等級對照
| 國際標準 | 無塵等級 | |||||
| ISO 14644-1 | ISO 3 | ISO 4 | ISO 5 | ISO 6 | ISO 7 | ISO 8 |
| 美國FS 209E | Class 1 | Class 10 | Class 100 | Class 1000 | Class 10000 | Class 100000 |
| 英國BS 5295 | C | D | E/F | G/H | J | K |
| 德國 VD I.2083 | 1C | 2 | 3 | 4 | 5 | 6 |
| 澳洲 AS 1386 | 0.035 | 0.35 | 3.5 | 35 | 350 | 3500 |
| 法國NOR X44101 | — | — | 4000 | — | 4,000 | 4,000,000 |
| Grade (藥品潔淨區等級) |
– | A/B | – | C | D | |
▶ 瞭解更多：無塵室是什麼？功能及潔淨度等級如何區分？